Vapor-liquid-solid growth of 4H-SiC single crystal films with extremely low carrier densities in chemical vapor deposition with a Pt-Si alloy flux and X-ray topography analysis of their dislocation propagation behaviors
Research output: Contribution to journal › Article › peer-review
Fingerprint
Dive into the research topics of 'Vapor-liquid-solid growth of 4H-SiC single crystal films with extremely low carrier densities in chemical vapor deposition with a Pt-Si alloy flux and X-ray topography analysis of their dislocation propagation behaviors'. Together they form a unique fingerprint.