Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations

Naoki Inomata, Libao Pan, Zhuqing Wang, Mitsuteru Kimura, Takahito Ono

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A highly sensitive thermal measurement device based on a vanadium oxide (VOx) microthermistor is developed for detecting biological molecules based on enzymatic reactions. The measurement principle of the VOx thermistor relies on the temperature dependence of its electrical resistance owing to the heat generation of enzymatic reactions. The device comprises a microfluidic channel and chambers, and VOx thermistors on a suspended Si3N4 membrane for thermal insulation. The enzyme is immobilized in silica gel on the sensor. The temperature coefficient of the resistance of the fabricated VOx thermistor is −1.3 %/K. The fabricated device has a temperature resolution of 0.30 mK/√Hz and a temperature response of 4.9 mV/K. Thermal measurements of cholesterol and glucose are demonstrated using the heat production caused by enzymatic reactions. The detectable concentrations of glucose and cholesterol were 30 and 15 µM/√Hz, respectively.

Original languageEnglish
Pages (from-to)2873-2879
Number of pages7
JournalMicrosystem Technologies
Volume23
Issue number7
DOIs
Publication statusPublished - 2017 Jul 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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