Vacuum sealed ultra miniature fiber-optic pressure sensor using white light interferometry

Kentaro Totsu, Yoichi Haga, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

Abstract

We have developed a fiber-optic Fabry-Perot interferometer pressure sensor of 125 μm in diameter of which cavity is sealed in vacuum. White light interferometry is used to avoid noise caused by bending of the optical fiber and a fluctuation of the light source. The reflection light is measured by high-speed spectrometer. A Fabry-Perot cavity is formed at the optical fiber end. A deformation of the diaphragm induced by pressure varies the cavity length. To avoid influence of temperature change to the sensor output, the cavity is sealed in vacuum. The sensing element is bonded to the optical fiber end by soldering in vacuum. Sn layer is formed on the metal spacer of the sensing element and is bonded to the Cr/Cu/Au layer patterned at the optical fiber end. Cr half-mirror is also patterned at the core of the fiber end for making interferometer. Pressure is successfully monitored in real-time using the sensor system.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages931-934
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Bonding
  • Chromium
  • Fabry-Perot interferometers
  • Fluctuations
  • Light sources
  • Optical fiber sensors
  • Optical fibers
  • Optical interferometry
  • Optical noise
  • Temperature sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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