Vacuum Property of Aluminum Alloy MBE Chamber

Maki Suemitsu, Nobuo Miyamoto

Research output: Contribution to journalArticlepeer-review

Abstract

A molecular beam epitaxy (MBE) chamber has been constructed with aluminum alloy featuring an ethanol lathing in its inner surface treatment. It showed a remarkable low outgassing rate which is less than 10-13 torr l/s cm2 after a 100°C, 45 hour bakeout. Reflecting this, the chamber can be pumped down to the order of 10–10 torr in 20 hours without bakeout and in 6 hours with bakeout. From these excellent vacuum performance, aluminum alloy UHV can claim to be a key technology for the industrialization of MBE.

Original languageEnglish
Pages (from-to)375-379
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Volume29
Issue number8
DOIs
Publication statusPublished - 1986

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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