Vacuum packaged micro-cantilever with a magnetic particle

Nurasyikin Mohd; Gaopeng Xue; Naoki Inomata; Nguyen Van Toan; Masaya Toda; Takahito Ono

doi:10.1541/ieejsmas.137.245

Vacuum packaged micro-cantilever with a magnetic particle

Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.

Original language	English
Pages (from-to)	245-246
Number of pages	2
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	137
Issue number	8
DOIs	https://doi.org/10.1541/ieejsmas.137.245
Publication status	Published - 2017 Jan 1

Keywords

Cantilever
Magnetic sensor
Vacuum packaging

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.137.245

Cite this

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abstract = "A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.",

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AU - Mohd, Nurasyikin

AU - Xue, Gaopeng

AU - Inomata, Naoki

AU - Van Toan, Nguyen

AU - Toda, Masaya

AU - Ono, Takahito

PY - 2017/1/1

Y1 - 2017/1/1

N2 - A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.

AB - A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.

KW - Cantilever

KW - Magnetic sensor

KW - Vacuum packaging

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Vacuum packaged micro-cantilever with a magnetic particle

Abstract

Keywords

ASJC Scopus subject areas

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