Abstract
A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.
Original language | English |
---|---|
Pages (from-to) | 245-246 |
Number of pages | 2 |
Journal | IEEJ Transactions on Sensors and Micromachines |
Volume | 137 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2017 Jan 1 |
Keywords
- Cantilever
- Magnetic sensor
- Vacuum packaging
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering