Vacuum packaged micro-cantilever with a magnetic particle

Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.

Original languageEnglish
Pages (from-to)245-246
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume137
Issue number8
DOIs
Publication statusPublished - 2017 Jan 1

Keywords

  • Cantilever
  • Magnetic sensor
  • Vacuum packaging

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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