Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The vacuum packaged cantilever with a small magnet is fabricated successfully, and applied to map the magnetic field and radical density at the ambient atmosphere based on magnetic force sensing. The 1.5-μm-thick Si cantilever with a 20-μm-diameter of Nd-Fe-B particle is packaged in a vacuum cavity using an anodic-bonding technique. Before the final bonding process, the relationship of the quality (Q) factor of cantilever with pressure is calibrated. After vacuum packaging, the pressure is determined to be in the range of 7.3×102 ∼ 1.0×103 Pa. The force sensitivity is estimated to be 1.1×10-13 N/√Hz. The magnetic fields with a resolution of ∼4.0×10-6 and ∼2.4×10-10 T are detected by measuring the variations of the resonant frequency and resonant amplitude of the cantilever, respectively. Also, the magnetic force caused by electron spin resonance (ESR) of a standard radical polymer, DPPH, is demonstrated at atmospheric environment.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1096-1099
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Anodic bonding
  • Cantilever
  • Magnetic sensor
  • Vacuum packaging

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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