Vacuum operation characteristics of two-dimensional micro-mirror

Hoang Manh Chu, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal frame, respectively. The scanner can be actuated simultaneously and independently in the two orthogonal axes using a slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges. The dependence of quality factor on pressure for the inner mirror and gimbal frame was also experimentally investigated and compared with the theoretical calculation based on air-friction models.

Original languageEnglish
Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages113-114
Number of pages2
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
Duration: 2010 Aug 92010 Aug 12

Publication series

Name2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Other

Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period10/8/910/8/12

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Chu, H. M., & Hane, K. (2010). Vacuum operation characteristics of two-dimensional micro-mirror. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 113-114). [5672159] (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672159