Vaccum Photothermal Vibration of the Thin Plate Fabricated by Lithographic Processes for the Development of a Laser Pressure Gauge

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	378-380
Number of pages	3
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	34
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.34.378
Publication status	Published - 1991
Externally published	Yes

ASJC Scopus subject areas

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title = "Vaccum Photothermal Vibration of the Thin Plate Fabricated by Lithographic Processes for the Development of a Laser Pressure Gauge",

author = "Kazuhiro Hane and Seiki Inaba",

year = "1991",

doi = "10.3131/jvsj.34.378",

language = "English",

volume = "34",

pages = "378--380",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

number = "3",

}

TY - JOUR

T1 - Vaccum Photothermal Vibration of the Thin Plate Fabricated by Lithographic Processes for the Development of a Laser Pressure Gauge

AU - Hane, Kazuhiro

AU - Inaba, Seiki

PY - 1991

Y1 - 1991

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U2 - 10.3131/jvsj.34.378

DO - 10.3131/jvsj.34.378

M3 - Article

AN - SCOPUS:85008749188

SN - 0559-8516

VL - 34

SP - 378

EP - 380

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

IS - 3

ER -