Vaccum Photothermal Vibration of the Thin Plate Fabricated by Lithographic Processes for the Development of a Laser Pressure Gauge

Kazuhiro Hane, Seiki Inaba

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)378-380
Number of pages3
JournalShinku/Journal of the Vacuum Society of Japan
Volume34
Issue number3
DOIs
Publication statusPublished - 1991

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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