Vacancy-type defects in MOSFETs with high-k gate dielectrics probed by monoenergetic positron beams

A. Uedono, R. Hasunuma, K. Shiraishi, K. Yamabe, S. Inumiya, Y. Akasaka, S. Kamiyama, T. Matsuki, T. Aoyama, Y. Nara, S. Miyazaki, H. Watanabe, N. Umezawa, T. Chikyow, S. Ishibashi, T. Ohdaira, R. Suzuki, K. Yamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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