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Vacancy-boron complexes in plasma immersion ion-implanted Si probed by a monoenergetic positron beam
Akira Uedono, Kazuo Tsutsui, Shoji Ishibashi, Hiromichi Watanabe, Shoji Kubota, Yasumasa Nakagawa, Bunji Mizuno, Takeo Hattori, Hiroshi Iwai
Research output: Contribution to journal › Article › peer-review
11
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(Scopus)