UV-assisted intermittently-spinning ozone steam etching of SU-8 for micromolding process

Shinya Yoshida, Kei Suzuki, Masayoshi Esashi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study reports on the usability of ultraviolet (UV)-assisted ozone steam etching for SU-8 removal in micromolding process. SU-8 is etched at a rate greater than 100 nm/min by intermittently rotating a substrate on a spinner with UV irradiation to spin out etching products. Its complete removability was also verified by analyzing the substrate surface after the ozone steam etching of SU-8 via scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). In a micromolding process, non-swelling removal of a 20-μm-thick SU-8 mold successfully left electroplated mushroom microstructures without destroying or residue. Such a structure cannot be released by conventional resist strippers, because it is lifted up due to resist swelling. Therefore, our new resist removal method is clearly demonstrated to have the usability and applicability for the micromolding process.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1621-1624
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/TerritorySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • Ozone steam etching
  • SU-8
  • micromolding process

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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