Upgrading multilayer zone plate technology for hard X-ray focusing

Toshiki Hirotomo, Hidekazu Takano, Kazuhiro Sumida, Takahisa Koyama, Shigeki Konishi, Satoshi Ichimaru, Tadayuki Ohchi, Hisataka Takenaka, Yoshiyuki Tsusaka, Yasushi Kagoshima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi2 and Si layers alternately deposited on a glass fiber by magnetron sputtering so that all zone boundaries satisfy the Fresnel zone configuration. The focused beam was evaluated using knife-edge scanning in which the measured intensity distribution is identical to the line spread function (LSF) in the focal plane. The focused beamsize of about 30nm was estimated by oscillation peaks observed in the measured LSF according to Rayleigh's criterion.

Original languageEnglish
Title of host publicationXRM 2014
Subtitle of host publicationProceedings of the 12th International Conference on X-Ray Microscopy
EditorsMartin D. de Jonge, David J. Paterson, Christopher G. Ryan
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735413436
DOIs
Publication statusPublished - 2016 Jan 28
Event12th International Conference on X-Ray Microscopy, XRM 2014 - Melbourne, Australia
Duration: 2014 Oct 262014 Oct 31

Publication series

NameAIP Conference Proceedings
Volume1696
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other12th International Conference on X-Ray Microscopy, XRM 2014
CountryAustralia
CityMelbourne
Period14/10/2614/10/31

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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