Uniformity improvement of optical and electrical characteristics in integrated vertical-to-surface transmission electro-photonic device with a vertical cavity

Kaori Kurihara, Takahiro Numai, Takashi Yoshikawa, Hideo Kosaka, Mitsunori Sugimoto, Yoshimasa Sugimoto, Kenichi Kasahara

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

We report an improvement in uniformity of both electrical and optical characteristics in an integrated vertical-to-surface transmission electro-photonic device with a vertical cavity. This improvement is due to both highly controlled reactive ion-beam etching and a self-alignment process. Reactive ion-beam etching highly controls etching depth, and leads to uniform electrical and optical characteristics. Self-alignment process makes it possible to fabricate a fine pattern with high accuracy. By using these fabrication processes, the deviations of both the electrical resistance and the optical light-output characteristics are reduced to less than half of those for the wet-etched devices. Furthermore, the remaining deviation in the light-output characteristics is reduced by suppressing light reflection on the surface. As a result, the standard deviation of the threshold current under the CW condition is 0.39 mA. This value is about half of that for the wet-etched devices.

Original languageEnglish
Pages (from-to)1352-1356
Number of pages5
JournalJapanese journal of applied physics
Volume33
Issue number3R
DOIs
Publication statusPublished - 1994 Mar

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Uniformity improvement of optical and electrical characteristics in integrated vertical-to-surface transmission electro-photonic device with a vertical cavity'. Together they form a unique fingerprint.

Cite this