Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance

N. Sato, S. Iizuka, Y. Nakagawa, T. Tsukada

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)

Abstract

A uniform plasma is produced by a new plane slotted antenna with permanent magnets for the electron cyclotron resonance. The plasma is uniform within a few percent in a diameter of 25-30 cm at a distance of 25-30 cm from the antenna. The plasma density, 1.5×1010 cm-3 with electron temperature of 1.8 eV at a microwave power of 100 W, is almost proportional to the microwave power. A magnetic distribution provided by the magnets is essential for producing such a uniform plasma.

Original languageEnglish
Pages (from-to)1469-1471
Number of pages3
JournalApplied Physics Letters
Volume62
Issue number13
DOIs
Publication statusPublished - 1993

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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