Abstract
This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.
Original language | English |
---|---|
Article number | 085001 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 25 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2015 Aug 1 |
Keywords
- Eu(TTA)<inf>3</inf>
- IR-to-visible conversion
- infrared thermal imaging sensor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering