Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor

Min Wang; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1088/0960-1317/25/8/085001

Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor

Min Wang, Takashiro Tsukamoto, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)₃, as a temperature-sensitive medium. An Eu(TTA)₃ thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)₃ was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)₃ was -2.1 ± 0.4% K^-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.

Original language	English
Article number	085001
Journal	Journal of Micromechanics and Microengineering
Volume	25
Issue number	8
DOIs	https://doi.org/10.1088/0960-1317/25/8/085001
Publication status	Published - 2015 Aug 1

Keywords

Eu(TTA)<inf>3</inf>
IR-to-visible conversion
infrared thermal imaging sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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title = "Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor",

abstract = "This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.",

keywords = "Eu(TTA)<inf>3</inf>, IR-to-visible conversion, infrared thermal imaging sensor",

author = "Min Wang and Takashiro Tsukamoto and Shuji Tanaka",

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AU - Tsukamoto, Takashiro

AU - Tanaka, Shuji

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N2 - This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.

AB - This paper reports an uncooled infrared (IR) thermal imaging sensor using europium phosphor, Eu(TTA)3, as a temperature-sensitive medium. An Eu(TTA)3 thin film was evaporated and deposited on a thermally isolated microstructure made of SU-8. The temperature dependency of luminescence from Eu(TTA)3 was used to convert the IR radiation power into visible-light intensity, which can be captured and digitized by a charge-coupled device (CCD) camera. The temperature coefficient of luminescence from the evaporated Eu(TTA)3 was -2.1 ± 0.4% K-1. Thermal images of a heater at 75-370 °C were acquired via a Ge lens. The minimum detectable temperature, noise-equivalent temperature difference (NETD), and thermal response time were measured as 75 °C, 2.66 K at 370 °C, and 0.2 s, respectively.

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KW - infrared thermal imaging sensor

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Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor

Abstract

Keywords

ASJC Scopus subject areas

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