Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

So Ito, Yuan Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi

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11 Citations (Scopus)

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Engineering & Materials Science