Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage

Yuki Shimizu, Masaya Furuta, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper presents an uncertainty analysis of a six-degree-of-freedom surface encoder, which is designed to measure multi-degree-of-freedom motion of a planar motion stage with a single laser beam. Since the surface encoder is composed of an optical sensor head and a two-axis scale grating, optical misalignments in the sensor head and form errors of the scale grating will affect the measurement uncertainty. In this paper, aiming to achieve further accurate measurement of translational displacement, an uncertainty budget table is built for the X-directional translational displacement measurement, while considering the above mentioned uncertainty sources.

Original languageEnglish
Pages (from-to)355-360
Number of pages6
JournalProcedia CIRP
Volume75
DOIs
Publication statusPublished - 2018
Event15th CIRP Conference on Computer Aided Tolerancing, CIRP CAT 2018 - Milan, Italy
Duration: 2018 Jun 112018 Jun 13

Keywords

  • Optical measurement
  • Surface encoder
  • Uncertainty

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering

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