Abstract
This paper presents an uncertainty analysis of a six-degree-of-freedom surface encoder, which is designed to measure multi-degree-of-freedom motion of a planar motion stage with a single laser beam. Since the surface encoder is composed of an optical sensor head and a two-axis scale grating, optical misalignments in the sensor head and form errors of the scale grating will affect the measurement uncertainty. In this paper, aiming to achieve further accurate measurement of translational displacement, an uncertainty budget table is built for the X-directional translational displacement measurement, while considering the above mentioned uncertainty sources.
Original language | English |
---|---|
Pages (from-to) | 355-360 |
Number of pages | 6 |
Journal | Procedia CIRP |
Volume | 75 |
DOIs | |
Publication status | Published - 2018 |
Event | 15th CIRP Conference on Computer Aided Tolerancing, CIRP CAT 2018 - Milan, Italy Duration: 2018 Jun 11 → 2018 Jun 13 |
Keywords
- Optical measurement
- Surface encoder
- Uncertainty
ASJC Scopus subject areas
- Control and Systems Engineering
- Industrial and Manufacturing Engineering