Ultraviolet-Induced Deposition of SiO2 Film from Tetraethoxysilane Spin-Coated on Si

Michio Niwano, Koji Kinashi, Nobuo Miyamoto, Kazuhiko Saito, Koji Honma

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

We have previously proposed a method for depositing silicon dioxide films on Si from tetraethoxysilane Si(OC2H5)4 (TEOS) using ultraviolet (UV) light from a low pressure mercury lamp. In the method, an organic solution which contains TEOS is spin-coated onto a Si wafer surface to form a thin organic film which is then exposed to the UV light to synthesize silicon dioxide. The photochemical reactions responsible for the oxide formation and the thermal properties of deposited films have been investigated using infrared (IR) and UV absorption spectroscopy and thermal desorption spectroscopy (TDS). IR and UV absorption data confirm that the UV light decomposes organic compounds in the spin-coated organic film to convert the film into a silicon dioxide film. We show that some photochemical reactions responsible for the decomposition of organic compounds are two-step processes. TDS data demonstrate that the deposited film is stable from substrate heating to approximately 400°C.

Original languageEnglish
Pages (from-to)1556-1561
Number of pages6
JournalJournal of the Electrochemical Society
Volume141
Issue number6
DOIs
Publication statusPublished - 1994 Jun

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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