Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus

Xinxin Li, Takahito Ono, Yuelin Wang, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

319 Citations (Scopus)

Abstract

A study was performed on the ultrathin single-crystalline-silicon cantilever resonators. The cantilever resonators were characterized by resonance testing in high vacuum. The results showed that the Young's modulus decreased monotonously as the cantilevers became thinner.

Original languageEnglish
Pages (from-to)3081-3083
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number15
DOIs
Publication statusPublished - 2003 Oct 13

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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