Ultrasonic force microscopy for nanometer resolution subsurface imaging

Kazushi Yamanaka, Hisato Ogiso, Oleg Kolosov

Research output: Contribution to journalArticlepeer-review

294 Citations (Scopus)


We present a novel method for nanometer resolution subsurface imaging. When a sample of atomic force microscope (AFM) is vertically vibrated at ultrasonic frequencies much higher than the cantilever resonance, the tip cannot vibrate but it is cyclically indented into the sample. By modulating the amplitude of ultrasonic vibration, subsurface features are imaged from the cantilever deflection vibration at the modulation frequency. By adding low-frequency lateral vibration to the ultrasonic vibration, subsurface features with different shear rigidity are imaged from the torsional vibration of cantilever. Thus controlling the direction of vibration forces, we can discriminate subsurface features of different elastic properties.

Original languageEnglish
Pages (from-to)178-180
Number of pages3
JournalApplied Physics Letters
Issue number2
Publication statusPublished - 1994

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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