Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor

Kazushi Yamanaka; Hiroshi Irihama; Toshihiro Tsuji; Keiichi Nakamoto

doi:10.1117/12.469611

Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor

Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto

ENG - Materials Processing

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

Original language	English
Pages (from-to)	85-92
Number of pages	8
Journal	Proceedings of SPIE-The International Society for Optical Engineering
Volume	4703
DOIs	https://doi.org/10.1117/12.469611
Publication status	Published - 2002 Jan 1

Keywords

Atomic force microscope
Contact stiffness
Damping
Nonlinear
Q-control
Ultrasound
Vibration

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.469611

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abstract = "Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.",

keywords = "Atomic force microscope, Contact stiffness, Damping, Nonlinear, Q-control, Ultrasound, Vibration",

author = "Kazushi Yamanaka and Hiroshi Irihama and Toshihiro Tsuji and Keiichi Nakamoto",

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AU - Yamanaka, Kazushi

AU - Irihama, Hiroshi

AU - Tsuji, Toshihiro

AU - Nakamoto, Keiichi

PY - 2002/1/1

Y1 - 2002/1/1

N2 - Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

AB - Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

KW - Atomic force microscope

KW - Contact stiffness

KW - Damping

KW - Nonlinear

KW - Q-control

KW - Ultrasound

KW - Vibration

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -

Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor

Abstract

Keywords

ASJC Scopus subject areas

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