Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor

Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

Original languageEnglish
Pages (from-to)85-92
Number of pages8
JournalProceedings of SPIE-The International Society for Optical Engineering
Volume4703
DOIs
Publication statusPublished - 2002 Jan 1

Keywords

  • Atomic force microscope
  • Contact stiffness
  • Damping
  • Nonlinear
  • Q-control
  • Ultrasound
  • Vibration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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