Abstract
Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.
Original language | English |
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Pages (from-to) | 85-92 |
Number of pages | 8 |
Journal | Proceedings of SPIE-The International Society for Optical Engineering |
Volume | 4703 |
DOIs | |
Publication status | Published - 2002 Jan 1 |
Keywords
- Atomic force microscope
- Contact stiffness
- Damping
- Nonlinear
- Q-control
- Ultrasound
- Vibration
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering