Ultrasonic atomic force microscope with overtone excitation of cantilever

Kazushi Yamanaka, Shizuka Nakano

Research output: Contribution to journalArticlepeer-review

143 Citations (Scopus)


We propose a novel atomic force microscope (AFM) combined with ultrasonic frequency vibration of a cantilever excited at its support. This method enables both topography and elasticity imaging of stiff samples such as metals and ceramics, without a need for bonding a transducer to the sample. When the sample surface is contacted with a tip attached to the cantilever, the cantilever vibration mode is changed according to the sample properties. It is theoretically predicted that the amplitude and resonant frequency of vibration at higher-order modes are useful parameters for elasticity evaluation of stiff samples. A preliminary experimental verification of this principle is presented using a glass-fiber-reinforced plastic sample. Clear elastic contrast was successfully obtained using a soft cantilever only when it was vibrated at MHz frequency higher-order modes.

Original languageEnglish
Pages (from-to)3787-3792
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number6 SUPPL. B
Publication statusPublished - 1996 Jun
Externally publishedYes


  • Atomic force microscope
  • Cantilever
  • Ceramics
  • Higher-order mode
  • Metal
  • Resonant frequency
  • Ultrasonic vibration

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


Dive into the research topics of 'Ultrasonic atomic force microscope with overtone excitation of cantilever'. Together they form a unique fingerprint.

Cite this