Abstract
We propose a novel atomic force microscope (AFM) combined with ultrasonic frequency vibration of a cantilever excited at its support. This method enables both topography and elasticity imaging of stiff samples such as metals and ceramics, without a need for bonding a transducer to the sample. When the sample surface is contacted with a tip attached to the cantilever, the cantilever vibration mode is changed according to the sample properties. It is theoretically predicted that the amplitude and resonant frequency of vibration at higher-order modes are useful parameters for elasticity evaluation of stiff samples. A preliminary experimental verification of this principle is presented using a glass-fiber-reinforced plastic sample. Clear elastic contrast was successfully obtained using a soft cantilever only when it was vibrated at MHz frequency higher-order modes.
Original language | English |
---|---|
Pages (from-to) | 3787-3792 |
Number of pages | 6 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 35 |
Issue number | 6 SUPPL. B |
DOIs | |
Publication status | Published - 1996 Jun |
Externally published | Yes |
Keywords
- Atomic force microscope
- Cantilever
- Ceramics
- Higher-order mode
- Metal
- Resonant frequency
- Ultrasonic vibration
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)