TY - JOUR
T1 - Ultrasoft-X-ray emission spectroscopy using a newly designed wavelength-dispersive spectrometer attached to a transmission electron microscope
AU - Terauchi, Masami
AU - Takahashi, Hideyuki
AU - Handa, Nobuo
AU - Murano, Takanori
AU - Koike, Masato
AU - Kawachi, Tetsuya
AU - Imazono, Takashi
AU - Koeda, Masaru
AU - Nagano, Tetsuya
AU - Sasai, Hiroyuki
AU - Oue, Yuki
AU - Yonezawa, Zeno
AU - Kuramoto, Satoshi
N1 - Funding Information:
This work was conducted as a project of Collaborative Development of Innovative Seeds (Practicability Verification Stage) by Japan Science and Technology Agency. Measurements of Li-K emission were partly supported by a grant-in-aid for Scientific Research on Priority Areas ‘New Materials Science Using Regulated Nano Spaces – Strategy in Ubiquitous Elements’ by the Ministry of Education, Culture, Sports, Science and Technology of Japan (No.19051002).
PY - 2012/2
Y1 - 2012/2
N2 - A new grating (JS50XL) for ultrasoft-X-ray spectroscopy in an energy range 50-200 eV was designed, manufactured and tested. A spectrometer composed of the grating and a multi-channel plate detector was constructed. At the low-energy end of this spectrometer, a sharp Fermi edge of Mg-L emission was observed at 49.5 eV with an energy resolution of 0.15 eV. Li-K emission spectra were obtained from metal-Li, surface-oxidized metal-Li and 5 Li-Al. Relative energy shifts observed in Al-L emission spectra of Al, AlN and MgAl2O4 were explained by shifts in core binding energies (chemical shift) and bandgap energies of those materials. Si-L emissions from Si, SiC and SiO2 (quartz) and P-L emissions from GaP and InP were presented. Furthermore, the grating was tilted to extend the lower limit of detection energy to 32 eV, and the whole intensity distribution of Mg-L emission was successfully obtained. These ultrasoft-X-ray emission spectra show a successful extension to lower-energy range using the new soft-X-ray emission spectroscopy instrument in electron microscopy.
AB - A new grating (JS50XL) for ultrasoft-X-ray spectroscopy in an energy range 50-200 eV was designed, manufactured and tested. A spectrometer composed of the grating and a multi-channel plate detector was constructed. At the low-energy end of this spectrometer, a sharp Fermi edge of Mg-L emission was observed at 49.5 eV with an energy resolution of 0.15 eV. Li-K emission spectra were obtained from metal-Li, surface-oxidized metal-Li and 5 Li-Al. Relative energy shifts observed in Al-L emission spectra of Al, AlN and MgAl2O4 were explained by shifts in core binding energies (chemical shift) and bandgap energies of those materials. Si-L emissions from Si, SiC and SiO2 (quartz) and P-L emissions from GaP and InP were presented. Furthermore, the grating was tilted to extend the lower limit of detection energy to 32 eV, and the whole intensity distribution of Mg-L emission was successfully obtained. These ultrasoft-X-ray emission spectra show a successful extension to lower-energy range using the new soft-X-ray emission spectroscopy instrument in electron microscopy.
KW - Li-K emission
KW - ultrasoft-X-ray emission
KW - wavelength-dispersive spectroscopy
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U2 - 10.1093/jmicro/dfr076
DO - 10.1093/jmicro/dfr076
M3 - Article
AN - SCOPUS:84856816018
VL - 61
SP - 1
EP - 8
JO - Microscopy (Oxford, England)
JF - Microscopy (Oxford, England)
SN - 2050-5698
IS - 1
ER -