Ultrasoft-X-ray emission spectroscopy using a newly designed wavelength-dispersive spectrometer attached to a transmission electron microscope

Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano, Masato Koike, Tetsuya Kawachi, Takashi Imazono, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto

    Research output: Contribution to journalArticlepeer-review

    38 Citations (Scopus)

    Abstract

    A new grating (JS50XL) for ultrasoft-X-ray spectroscopy in an energy range 50-200 eV was designed, manufactured and tested. A spectrometer composed of the grating and a multi-channel plate detector was constructed. At the low-energy end of this spectrometer, a sharp Fermi edge of Mg-L emission was observed at 49.5 eV with an energy resolution of 0.15 eV. Li-K emission spectra were obtained from metal-Li, surface-oxidized metal-Li and 5 Li-Al. Relative energy shifts observed in Al-L emission spectra of Al, AlN and MgAl2O4 were explained by shifts in core binding energies (chemical shift) and bandgap energies of those materials. Si-L emissions from Si, SiC and SiO2 (quartz) and P-L emissions from GaP and InP were presented. Furthermore, the grating was tilted to extend the lower limit of detection energy to 32 eV, and the whole intensity distribution of Mg-L emission was successfully obtained. These ultrasoft-X-ray emission spectra show a successful extension to lower-energy range using the new soft-X-ray emission spectroscopy instrument in electron microscopy.

    Original languageEnglish
    Pages (from-to)1-8
    Number of pages8
    JournalJournal of Electron Microscopy
    Volume61
    Issue number1
    DOIs
    Publication statusPublished - 2012 Feb

    Keywords

    • Li-K emission
    • ultrasoft-X-ray emission
    • wavelength-dispersive spectroscopy

    ASJC Scopus subject areas

    • Instrumentation

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