Ultraprecise Machine Tool Equipped with a Giant Magnetostriction Actuator - Development of New Materials, Tbx Dy1-x, (Fey Mn1-y)n, and Their Application

H. Eda, E. Ohmura, M. Sahashi, T. Kobayashi, N. Ikawa

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

By developing several alloys with the composition TbxDy1-x, (Fex, Mn1-y)n, a giant magnetostriction actuator was manufactured. The output power of them is several times and the displacement is several ten times as much as PZT without a magnifier. A temperature controller to keep a fluctuation of the cooling water within 10m°C was developed for the actuator. An ultra-precise machine tool was also developed. equipping the present actuator. The depth of cut can be set with the accuracy of several nanometers by the actuator and cut by a turning diamond tool. The hard and brittle materials such as glass and ceramics were finished in ductile mode, and the surface roughness was obtained within several nanometers.

Original languageEnglish
Pages (from-to)421-424
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume41
Issue number1
DOIs
Publication statusPublished - 1992

Keywords

  • actuators
  • brittle-ductile transition
  • diamond turning machines
  • giant magnetostriction
  • ultra-precision machining

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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