Ultrafast laser ablation of 10-nm self-supporting membranes by two-beam interference processing

Yuuki Uesugi, Ryota Fukushima, Yuichi Kozawa, Shunichi Sato

Research output: Contribution to journalArticlepeer-review

Abstract

Ultrafast laser ablation was applied to process 10-nm self-supporting membranes. The membranes were processed over tens of square micrometers by single-shot irradiation of two visible laser pulses, followed by the realization of periodic sub-microstructures. The fabricated geometry is dependent on the intensity distribution of the superposed input pulses, providing flexibility and facilitating practical micro- and nanoengineering. Ease of designing the processing parameters and speed of processing are the significant advantages of this method compared to focused ion beam (FIB) milling.

Original languageEnglish
Pages (from-to)26200-26206
Number of pages7
JournalOptics Express
Volume28
Issue number18
DOIs
Publication statusPublished - 2020 Aug 31

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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