Ultra wide band resonator composed of grooved Cu-electrode on LiNbO 3 and its application to tunable filter

Michio Kadota, Tetsuya Kimura, Yasuyuki Ida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Citations (Scopus)

Abstract

A leaky surface acoustic wave (LSAW) on 0-15° YX-LiNbO3 has a large electro-mecahnical coupling factor, but it has a leaky component. The LSAW changes to Love wave without its leaky component, by using a high density metal electrode with a low velocity such as Au and Cu on that substrate. It was reported that a resonator composed of a Cu-electrode/15° YX-LiNbO 3 had wide bandwidth of 12%. This time, in order to obtain a resonator with a wider bandwidth, authors attempted to fabricate one-port resonators composed of a grooved Cu-electrode/4° YX-LiNbO3. As the result, this resonator had a wider bandwidth of 17% of 1.3 times and higher resonant and anti-resonant frequencies of 1.3 times than the resonator composed of a conventional type of same thick Cu-electrode on 4° YX-LiNbO3 for reference. Authors proposed to apply this resonator to a tunable filter. As the result, the tunable filter having tunable range of 7% in center frequency was realized.

Original languageEnglish
Title of host publication2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2668-2671
Number of pages4
ISBN (Print)9781424443895
DOIs
Publication statusPublished - 2009
Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
Duration: 2009 Sep 202009 Sep 23

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2009 IEEE International Ultrasonics Symposium, IUS 2009
CountryItaly
CityRome
Period09/9/2009/9/23

Keywords

  • Grooved Cu-electrode
  • LiNbO
  • Resonator
  • Tunable filter
  • Ultra wide band

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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