Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan Liu Chen, Wei Gao

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

An ultra-sensitive angle sensor employing single-cell photodiodes, which allows tighter focusing leading to a higher angular resolution better than 0.001 arc-second, has been designed based on laser autocollimation. Aiming to investigate the influences of spherical aberrations in the optical system on the sensor sensitivity, an optical model has been established based on wave optics. Computer simulation has been carried out by using the model, and its feasibility has been verified in experiments. In addition, a prototype optical angle sensor has been designed in a compact size of 100 mm × 150 mm, and its measurement resolution has been verified in experiments.

Original languageEnglish
Pages (from-to)2788-2805
Number of pages18
JournalOptics Express
Volume24
Issue number3
DOIs
Publication statusPublished - 2016 Feb 8

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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