Ultra-precision scanning tunneling microscope for measurement of high-aspect ratio structures

Shigeaki Goto, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents an ultra-precision STM system that consists of an STM probe, a long stroke PZT actuator, and a linear encoder. The linear encoder yields a resolution of 0.5 nm over a full stroke of the actuator (70 μm), generating a dynamic range of 102.9 dB. The linearity error of the developed STM system is smaller than 5 nm over a range of 50 μm. Measurement experiment was carried out by using the STM system. The result was compared with that of using an AFM and that by a commercial SEM.

Original languageEnglish
Title of host publication10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
Pages489-492
Number of pages4
Publication statusPublished - 2010 Dec 1
Event10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, Japan
Duration: 2010 Sep 52010 Sep 9

Publication series

Name10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010

Other

Other10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
CountryJapan
CityOsaka
Period10/9/510/9/9

Keywords

  • 3D micro-structure
  • Precision
  • SPM
  • STM

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality

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