Abstract
This paper describes an instrument called nanoshape for measuring surface forms of aspheric optical elements on the processing machine. The instrument employs a contact-type scanning stylus. An original inclined self-weight method is designed to control the contact force. In this method, the contact force is generated by inclining the air slider of the instrument, on which the stylus is attached, from the horizontal plane only a little below the stylus. As a result, an extremely steady low contact force (measuring force) can be easily achieved. A nanometer resolution of displacement measurement also becomes possible. The instrument is mounted on an ultra-precision grinding machine for on-machine measurement in actual processing. The effectiveness of the on-machine measurement system is confirmed by the result of compensation processing based on the measurement data.
| Original language | English |
|---|---|
| Pages (from-to) | 535-540 |
| Number of pages | 6 |
| Journal | Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao |
| Volume | 27 |
| Issue number | 5 |
| Publication status | Published - 2006 Oct |
Keywords
- Aspheric lens
- Contact stylus
- Inclined self-weight method
- Instrumentation
- Nanoshape
- On-machine measurement
ASJC Scopus subject areas
- Mechanical Engineering