Ultra-precision on-machine measurement system for aspheric optical elements

Y. Nagaike, Y. Nakamura, Y. Ito, W. Gao, T. Kuriyagawa

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

This paper describes an instrument called nanoshape for measuring surface forms of aspheric optical elements on the processing machine. The instrument employs a contact-type scanning stylus. An original inclined self-weight method is designed to control the contact force. In this method, the contact force is generated by inclining the air slider of the instrument, on which the stylus is attached, from the horizontal plane only a little below the stylus. As a result, an extremely steady low contact force (measuring force) can be easily achieved. A nanometer resolution of displacement measurement also becomes possible. The instrument is mounted on an ultra-precision grinding machine for on-machine measurement in actual processing. The effectiveness of the on-machine measurement system is confirmed by the result of compensation processing based on the measurement data.

Original languageEnglish
Pages (from-to)535-540
Number of pages6
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume27
Issue number5
Publication statusPublished - 2006 Oct 1

Keywords

  • Aspheric lens
  • Contact stylus
  • Inclined self-weight method
  • Instrumentation
  • Nanoshape
  • On-machine measurement

ASJC Scopus subject areas

  • Mechanical Engineering

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