Ultra-miniature fiber-optic pressure sensor using white light interferometry

Kentaro Totsu, Yoichi Haga, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

126 Citations (Scopus)

Abstract

We have developed a fiber-optic Fabry-Perot interferometric pressure sensor of 125 μm in diameter and a detection system for medical use. A Fabry-Perot cavity is formed at an optical fiber end. A deformation of the diaphragm of the Fabry-Perot cavity induced by pressure varies the cavity length. White light interferometry is used to avoid error and noise caused by bending of the optical fiber and fluctuation of the light source. The reflection light of the sensor cavity is detected by a commercial high-speed spectrometer. A pressure change has been detected by using the developed sensor system. Animal experiments using a goat have been carried out and dynamic pressure changes in the internal pressure of heart and aorta have been successfully monitored.

Original languageEnglish
Pages (from-to)71-75
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number1
DOIs
Publication statusPublished - 2005 Jan

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Ultra-miniature fiber-optic pressure sensor using white light interferometry'. Together they form a unique fingerprint.

Cite this