Ultra-low power Si-photonic variable-gap coupler switch with nano-latch mechanism

S. Abe, Y. Munemasa, Y. Kanamori, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A Si-nanowire variable-gap coupler switch with a nano-latch mechanism is designed and fabricated for on-chip waveguide circuits in Si-photonics. The designed switch consists of a coupler of two freestanding 400 nm wide 260 nm thick Si waveguides, three 30 μm wide 40 μm long comb-drive actuators, and a nano-latch mechanism. The nano-latch mechanism consists of four hook-shaped latches to hold a switch-on condition at a coupler gap of about 100 nm. The proposed switch is fabricated on a silicon-on-insulator wafer by electron beam lithography. The switching and latching characteristics are measured. The port isolation under the latched condition is measured from infrared camera images. Due to the capacitive operation of the actuators and the nano-latch mechanism, the power consumption of the switch is extremely small comparing with the conventional thermo-optical switches.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages904-907
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • Si-photonics
  • comb actuator
  • waveguide coupler
  • waveguide switch

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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