Ultra-high speed video capturing of time dependent dielectric breakdown of metal-oxide-silicon capacitor up to 10M frame per second

F. Shao, D. Kimoto, K. Furukawa, H. Sugo, T. Takeda, K. Miyauchi, Y. Tochigi, R. Kuroda, S. Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, the ultra-high speed (UHS) video capturing results of time dependent dielectric breakdown (TDDB) of MOS capacitors using the UHS camera with the maximum frame rate of 10M frame per second (fps) are reported. In order to capture the breakdown, we set a trigger circuit which detects the rapid current increase through the MOS capacitor. Some movies have succeeded to capture the intermittent light emissions on some points of the gate during the breakdown. From the movies taken at 100K to 1M fps, the distribution centers of the light emission time and the period were 10 sec and 30 μsec, respectively. From the movies taken at 10M fps, the light emission time and the period were less than 10 μsec. The random failure mode has higher percentage of single light emissions than that of the wear-out failure mode, indicating a correlation between of the light emission mode and the TDDB failure mode.

Original languageEnglish
Title of host publicationProceedings of SPIE-IS and T Electronic Imaging - Image Sensors and Imaging Systems 2014
PublisherSPIE
ISBN (Print)9780819499394
DOIs
Publication statusPublished - 2014 Jan 1
EventImage Sensors and Imaging Systems 2014 - San Francisco, CA, United States
Duration: 2014 Feb 52014 Feb 6

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9022
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherImage Sensors and Imaging Systems 2014
CountryUnited States
CitySan Francisco, CA
Period14/2/514/2/6

Keywords

  • Dielectric Breakdown
  • MOS capacitor
  • TDDB
  • high-speed image sensor
  • high-speed imaging

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Shao, F., Kimoto, D., Furukawa, K., Sugo, H., Takeda, T., Miyauchi, K., Tochigi, Y., Kuroda, R., & Sugawa, S. (2014). Ultra-high speed video capturing of time dependent dielectric breakdown of metal-oxide-silicon capacitor up to 10M frame per second. In Proceedings of SPIE-IS and T Electronic Imaging - Image Sensors and Imaging Systems 2014 [902205] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9022). SPIE. https://doi.org/10.1117/12.2040859