Ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin film

M. Munakata, M. Motoyama, M. Yagi, T. Ito, Y. Shimada, Masahiro Yamaguchi, K. I. Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have previously reported that our hetero-amorphous structured films are an excellent candidate for the magnetic core materials for GHz frequency use because of their high resistivity (Munakata et al. (2001)). However, a further increase of the resistivity is desired for sufficient removal of eddy current loss. In the present work, (Co35Fe50B14.4)-(SiO2) soft magnetic films with ultra-high resistivity of 116,000 ìÙcm were fabricated, which is 30 times larger than the maximum published value at present. The microstructure of the film associated with the very high resistivity was investigated. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-rf magnetron sputtering. The permeability in a few GHz range was measured by a permeance meter. The structure of the film was analyzed by transmission electron microscopy (TEM).

Original languageEnglish
Title of host publicationINTERMAG Europe 2002 - IEEE International Magnetics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780373650, 9780780373655
DOIs
Publication statusPublished - 2002
Event2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

Other

Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
CountryNetherlands
CityAmsterdam
Period02/4/2802/5/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

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