Abstract
The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.
Original language | English |
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Journal | Digests of the Intermag Conference |
Publication status | Published - 2002 Dec 1 |
Event | 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering