The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.
|Journal||Digests of the Intermag Conference|
|Publication status||Published - 2002 Dec 1|
|Event||2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands|
Duration: 2002 Apr 28 → 2002 May 2
ASJC Scopus subject areas
- Electrical and Electronic Engineering