Ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin film

Makoto Munakata, Mashio Motoyama, Masaaki Yagi, Tetsuo Ito, Yutaka Shimada, Masahiro Yamaguchi, Ken Ichi Arai

Research output: Contribution to journalConference article

Abstract

The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.

Original languageEnglish
JournalDigests of the Intermag Conference
Publication statusPublished - 2002 Dec 1
Event2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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