Ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin film

Makoto Munakata; Mashio Motoyama; Masaaki Yagi; Tetsuo Ito; Yutaka Shimada; Masahiro Yamaguchi; Ken Ichi Arai

Ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO₂) thin film

Makoto Munakata, Mashio Motoyama, Masaaki Yagi, Tetsuo Ito, Yutaka Shimada, Masahiro Yamaguchi, Ken Ichi Arai

ENG - Electrical Engineering

Research output: Contribution to journal › Conference article

Abstract

The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO₂) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.

Original language	English
Journal	Digests of the Intermag Conference
Publication status	Published - 2002 Dec 1
Event	2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "Ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin film",

abstract = "The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.",

author = "Makoto Munakata and Mashio Motoyama and Masaaki Yagi and Tetsuo Ito and Yutaka Shimada and Masahiro Yamaguchi and Arai, {Ken Ichi}",

year = "2002",

month = dec,

day = "1",

language = "English",

journal = "Digests of the Intermag Conference",

issn = "0074-6843",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG ; Conference date: 28-04-2002 Through 02-05-2002",

}

TY - JOUR

T1 - Ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin film

AU - Munakata, Makoto

AU - Motoyama, Mashio

AU - Yagi, Masaaki

AU - Ito, Tetsuo

AU - Shimada, Yutaka

AU - Yamaguchi, Masahiro

AU - Arai, Ken Ichi

PY - 2002/12/1

Y1 - 2002/12/1

N2 - The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.

AB - The ultra-high electrical resistivity and hetero-amorphous structure of GHz soft magnetic (CoFeB)-(SiO2) thin films was analyzed. The films with thickness of 0.5 μm were deposited on glass substrates by synchronous triple-resonance frequency magnetron sputtering. It was found that the relative permeability exhibits a flat frequency dependence up to 2 GHz with resonance frequency higher than 3 GHz, reflecting the very high resistivity and high anisotropy field.

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UR - http://www.scopus.com/inward/citedby.url?scp=18144435503&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:18144435503

JO - Digests of the Intermag Conference

JF - Digests of the Intermag Conference

SN - 0074-6843

T2 - 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG

Y2 - 28 April 2002 through 2 May 2002

ER -