Two Stage Implantation Reaction Model in Metal β-Diketonates

Recoil implantation reaction is discussed over a wide range 10-10⁵ eV. The reaction model involving a displacement reaction in the low energy region and collision cascade enhancement in the high energy region can be used to reasonably explain the complex yield (Y) and energy (E) relation. The recoil reaction of the implanted *Ru with catcher Fe(dbm)₃ gives *Ru(dbm)₃ where *Ru is ⁹⁷Ru, ¹⁰³Ru. and ¹⁰⁵Ru. For this case the experimental Y - E relation in the low energy region can be fitted by the equation Y = A(E - E_th)ⁿ/[1 + (E - E_th)ⁿ] with threshold (appearance) energy E_th of 154 eV when n is taken as 4. The collision cascade phenomenon in the high energy region is suggested to be strongly correlated with shock wave effects which result in a local Hugoniot state highly compressed and heated in the vicinity of the recoil implanted atom.