Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

Chuan Hui Ou; Yu Ching Lin; Yoshiteru Keikoin; Takahito Ono; Masayoshi Esashi; Yao Chuan Tsai

doi:10.7567/1347-4065/ab0493

Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

Chuan Hui Ou, Yu Ching Lin, Yoshiteru Keikoin, Takahito Ono, Masayoshi Esashi, Yao Chuan Tsai

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has excellent mechanical and magnetic properties. In this paper, Fe-based metallic glass is used as magnetic actuation material and torsion bar structure material. The Fe-based metallic glass thin film deposited on a micromirror surface is used as magnetic material that can be magnetically polarized by permanent magnets. Besides, the micromirror consists of two pairs of metallic glass torsion bars to achieve 2D scanning. The excellent mechanical properties of metallic glass were used for increasing the strength and reliability of the micromirror. The fabricated 2D micromirror can be actuated by an electromagnetic solenoid in dual resonant modes. The result shows that the scanning angle of the outer slow axis is 11° at 800 Hz and that of the inner fast axis is 90° at 5249 Hz.

Original language	English
Article number	SDDL01
Journal	Japanese journal of applied physics
Volume	58
Issue number	SD
DOIs	https://doi.org/10.7567/1347-4065/ab0493
Publication status	Published - 2019

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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@article{92939ce30d2541248b5309407d654081,

title = "Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator",

abstract = "A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has excellent mechanical and magnetic properties. In this paper, Fe-based metallic glass is used as magnetic actuation material and torsion bar structure material. The Fe-based metallic glass thin film deposited on a micromirror surface is used as magnetic material that can be magnetically polarized by permanent magnets. Besides, the micromirror consists of two pairs of metallic glass torsion bars to achieve 2D scanning. The excellent mechanical properties of metallic glass were used for increasing the strength and reliability of the micromirror. The fabricated 2D micromirror can be actuated by an electromagnetic solenoid in dual resonant modes. The result shows that the scanning angle of the outer slow axis is 11° at 800 Hz and that of the inner fast axis is 90° at 5249 Hz.",

author = "Ou, {Chuan Hui} and Lin, {Yu Ching} and Yoshiteru Keikoin and Takahito Ono and Masayoshi Esashi and Tsai, {Yao Chuan}",

note = "Funding Information: This project was supported by the Ministry of Science and Technology, R.O.C. with Grant No. MOST 105-2218-E-005-010-MY2. Publisher Copyright: {\textcopyright} 2019 The Japan Society of Applied Physics.",

year = "2019",

doi = "10.7567/1347-4065/ab0493",

language = "English",

volume = "58",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

AU - Ou, Chuan Hui

AU - Lin, Yu Ching

AU - Keikoin, Yoshiteru

AU - Ono, Takahito

AU - Esashi, Masayoshi

AU - Tsai, Yao Chuan

N1 - Funding Information: This project was supported by the Ministry of Science and Technology, R.O.C. with Grant No. MOST 105-2218-E-005-010-MY2. Publisher Copyright: © 2019 The Japan Society of Applied Physics.

PY - 2019

Y1 - 2019

N2 - A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has excellent mechanical and magnetic properties. In this paper, Fe-based metallic glass is used as magnetic actuation material and torsion bar structure material. The Fe-based metallic glass thin film deposited on a micromirror surface is used as magnetic material that can be magnetically polarized by permanent magnets. Besides, the micromirror consists of two pairs of metallic glass torsion bars to achieve 2D scanning. The excellent mechanical properties of metallic glass were used for increasing the strength and reliability of the micromirror. The fabricated 2D micromirror can be actuated by an electromagnetic solenoid in dual resonant modes. The result shows that the scanning angle of the outer slow axis is 11° at 800 Hz and that of the inner fast axis is 90° at 5249 Hz.

AB - A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has excellent mechanical and magnetic properties. In this paper, Fe-based metallic glass is used as magnetic actuation material and torsion bar structure material. The Fe-based metallic glass thin film deposited on a micromirror surface is used as magnetic material that can be magnetically polarized by permanent magnets. Besides, the micromirror consists of two pairs of metallic glass torsion bars to achieve 2D scanning. The excellent mechanical properties of metallic glass were used for increasing the strength and reliability of the micromirror. The fabricated 2D micromirror can be actuated by an electromagnetic solenoid in dual resonant modes. The result shows that the scanning angle of the outer slow axis is 11° at 800 Hz and that of the inner fast axis is 90° at 5249 Hz.

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JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

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Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

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