TY - GEN
T1 - Two-dimensional imaging of trap distribution in SiO2/SiC interface using local deep level transient spectroscopy based on super-higher-order scanning nonlinear dielectric microscopy
AU - Chinone, Norimichi
AU - Kosugi, Ryoji
AU - Tanaka, Yasunori
AU - Harada, Shinsuke
AU - Okumura, Hajime
AU - Cho, Yasuo
N1 - Publisher Copyright:
© 2017 Trans Tech Publications, Switzerland.
PY - 2017
Y1 - 2017
N2 - A new technique for local deep level transient spectroscopy (DLTS) imaging using super-higher-order scanning nonlinear dielectric microscopy is proposed. Using this technique, SiO2/SiC structure samples with different post oxidation annealing (POA) conditions were measured. We observed that the local DLTS signal decreases with POA levels, which agrees with the well-known phenomena that POA reduces trap density. Furthermore, obtained local DLTS images had dark and bright areas, which is considered to show the trap distribution at/near SiO2/SiC interface.
AB - A new technique for local deep level transient spectroscopy (DLTS) imaging using super-higher-order scanning nonlinear dielectric microscopy is proposed. Using this technique, SiO2/SiC structure samples with different post oxidation annealing (POA) conditions were measured. We observed that the local DLTS signal decreases with POA levels, which agrees with the well-known phenomena that POA reduces trap density. Furthermore, obtained local DLTS images had dark and bright areas, which is considered to show the trap distribution at/near SiO2/SiC interface.
KW - Local deep level transient spectroscopy
KW - Scanning nonlinear dielectric microscopy
KW - SiO/SiC interface
UR - http://www.scopus.com/inward/record.url?scp=85020066474&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85020066474&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.897.127
DO - 10.4028/www.scientific.net/MSF.897.127
M3 - Conference contribution
AN - SCOPUS:85020066474
SN - 9783035710434
T3 - Materials Science Forum
SP - 127
EP - 130
BT - Silicon Carbide and Related Materials 2016
A2 - Zekentes, Konstantinos
A2 - Zekentes, Konstantinos
A2 - Vasilevskiy, Konstantin V.
A2 - Frangis, Nikolaos
PB - Trans Tech Publications Ltd
T2 - 11th European Conference on Silicon Carbide and Related Materials, ECSCRM 2016
Y2 - 25 September 2016 through 29 September 2016
ER -