Two-dimensional detector for high resolution soft X-ray imaging

Takeo Ejima; Shodo Ogasawara; Tadashi Hatano; Mihiro Yanagihara; Masaki Yamamoto

doi:10.1063/1.3463337

Two-dimensional detector for high resolution soft X-ray imaging

Takeo Ejima, Shodo Ogasawara, Tadashi Hatano, Mihiro Yanagihara, Masaki Yamamoto

Center for Advanced Microscopy and Spectroscopy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

A new two-dimensional (2D) detector for detecting soft X-ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30-6nm region.

Original language	English
Title of host publication	SRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation
Pages	811-814
Number of pages	4
DOIs	https://doi.org/10.1063/1.3463337
Publication status	Published - 2010 Aug 3
Event	10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009 - Melbourne, VIC, Australia Duration: 2009 Sep 27 → 2009 Oct 2

Publication series

Name	AIP Conference Proceedings
Volume	1234
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009
Country	Australia
City	Melbourne, VIC
Period	09/9/27 → 09/10/2

Keywords

high spatial resolution
quantum efficiency
scintillator
two dimensional detector

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.3463337

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Cite this

Two-dimensional detector for high resolution soft X-ray imaging. / Ejima, Takeo; Ogasawara, Shodo; Hatano, Tadashi; Yanagihara, Mihiro; Yamamoto, Masaki.

SRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation. 2010. p. 811-814 (AIP Conference Proceedings; Vol. 1234).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ejima, T, Ogasawara, S, Hatano, T, Yanagihara, M & Yamamoto, M 2010, Two-dimensional detector for high resolution soft X-ray imaging. in SRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation. AIP Conference Proceedings, vol. 1234, pp. 811-814, 10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009, Melbourne, VIC, Australia, 09/9/27. https://doi.org/10.1063/1.3463337

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abstract = "A new two-dimensional (2D) detector for detecting soft X-ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30-6nm region.",

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