TY - GEN
T1 - Two-dimensional detector for high resolution soft X-ray imaging
AU - Ejima, Takeo
AU - Ogasawara, Shodo
AU - Hatano, Tadashi
AU - Yanagihara, Mihiro
AU - Yamamoto, Masaki
PY - 2010/8/3
Y1 - 2010/8/3
N2 - A new two-dimensional (2D) detector for detecting soft X-ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30-6nm region.
AB - A new two-dimensional (2D) detector for detecting soft X-ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30-6nm region.
KW - high spatial resolution
KW - quantum efficiency
KW - scintillator
KW - two dimensional detector
UR - http://www.scopus.com/inward/record.url?scp=77955018963&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77955018963&partnerID=8YFLogxK
U2 - 10.1063/1.3463337
DO - 10.1063/1.3463337
M3 - Conference contribution
AN - SCOPUS:77955018963
SN - 9780735407824
T3 - AIP Conference Proceedings
SP - 811
EP - 814
BT - SRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation
T2 - 10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009
Y2 - 27 September 2009 through 2 October 2009
ER -