Two-dimensional defect mapping of the SiO2/4H-SiC interface

Judith Woerle, Brett C. Johnson, Corrado Bongiorno, Kohei Yamasue, Gabriel Ferro, Dipanwita Dutta, Thomas A. Jung, Hans Sigg, Yasuo Cho, Ulrike Grossner, Massimo Camarda

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Current generations of 4H-SiC metal-oxide-semiconductor field-effect transistors are still challenged by the high number of defects at the SiO2/SiC interface that limit both the performance and gate reliability of these devices. One potential source of the high density of interface defect states (Dit) is the stepped morphology on commonly used off-axially grown epitaxial surfaces, favoring incomplete oxidation and the formation of defective transition layers. Here we report measurements on intentionally modified 4H-SiC surfaces exhibiting both atomically flat and stepped regions where the generation of interface defects can be directly linked to differences in surface roughness. By combining spatially resolving structural, chemical, optical, and electrical analysis techniques, a strong increase of Dit for stepped surfaces was revealed while regions with an atomically flat SiC surface exhibited close-to-ideal interface properties.

Original languageEnglish
Article number084602
JournalPhysical Review Materials
Volume3
Issue number8
DOIs
Publication statusPublished - 2019 Aug 15

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

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