Two-dimensional control of shape-memory-alloy actuators for aligning a si micromachined pinhole of spatial filter

Minoru Sasaki, Wataru Kamada, Kazuhiro Hane

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The automatic alignment of a pinhole is realized in two dimensions and its function as a spatial filter is confirmed. A pinhole device surrounded by four photodiode cells fabricated by Si micromachining techniques is placed on a movable xy stage which consists of four shape-memory-alloy actuators. The feedback control based on the signal obtained from the integrated photodiode is confirmed to be feasible for aligning a pinhole in two dimensions even if the shape-memory-alloy actuators are disadvantageous for controlling its displacement including cross-interaction. The spatial filtering function of an automatically aligned pinhole is confirmed.

Original languageEnglish
Pages (from-to)7190-7193
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number12 B
Publication statusPublished - 1999 Dec 1

Keywords

  • Automatic alignment
  • Photodiode
  • Pinhole
  • Shape-memory-alloy
  • Si micromachining

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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