Two dimensional automatic alignment of pinhole integrated with photodiode

M. Sasaki, W. Kamada, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The authors use apparatus in which a Si micromachined pinhole surrounded by photodiode cells is used for automatic alignment. When the laser beam is apart from the pinhole and incident on the photodiode cells placed around it, the relative position of the laser spot from the pinhole can be found by comparing the photocurrents obtained from four photodiode cells. Using this signal as the input of the feedback control, actuators move the pinhole so that the laser beam can pass through the pinhole. In our previous study (1998), a one dimensional version of the automatic alignment was achieved using a Si micromachined pinhole and shape memory alloy actuators. In this study, two dimensional automatic alignment is described.

Original languageEnglish
Title of host publication1999 International Microprocesses and Nanotechnology Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages194-195
Number of pages2
ISBN (Electronic)4930813972, 9784930813978
DOIs
Publication statusPublished - 1999 Jan 1
Event1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan
Duration: 1999 Jul 61999 Jul 8

Publication series

Name1999 International Microprocesses and Nanotechnology Conference

Other

Other1999 International Microprocesses and Nanotechnology Conference
CountryJapan
CityYokohama
Period99/7/699/7/8

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Two dimensional automatic alignment of pinhole integrated with photodiode'. Together they form a unique fingerprint.

Cite this