Tunable vertical comb for driving micromirror realized by bending device wafer

Minoru Sasaki, Masahiro Ishimori, Jonghyeong Song, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

Original languageEnglish
Pages (from-to)147-148
Number of pages2
JournalIEICE Transactions on Electronics
VolumeE90-C
Issue number1
DOIs
Publication statusPublished - 2007 Jan

Keywords

  • Micromirror
  • Tuning
  • Vertical comb
  • Wafer bending

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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