TY - JOUR
T1 - Tunable surface acoustic wave filter using integrated micro-electro- mechanical-system based varactors made of electroplated gold
AU - Konno, Akira
AU - Hirano, Hideki
AU - Inaba, Masahiro
AU - Hashimoto, Ken Ya
AU - Esashi, Masayoshi
AU - Tanaka, Shuji
PY - 2013/7
Y1 - 2013/7
N2 - This paper describes the fabrication and preliminary evaluation of a 200 terminated, 1 GHz tunable surface acoustic wave (SAW) filter with electrostatic micro-electro-mechanical-system (MEMS) varactors. The tunable filter was constructed on a 15 Y LiNbO3 substrate to use Love wave with an electromechanical coupling coefficient as high as 25%. The bridge structure of the MEMS varactor was fabricated by Au electroplating on a sacrificial photoresist, which was finally removed by either O2 plasma ashing or O3 water etching. The measured center frequency was 1.07 GHz, and the bandwidth was 171 MHz, i.e., 16% in relative bandwidth. The MEMS varactor, which was connected to a series SAW resonator in parallel, pulled in by an actuation voltage of 150 V DC, and the right passband edge moved to lower frequency side by 15 MHz.
AB - This paper describes the fabrication and preliminary evaluation of a 200 terminated, 1 GHz tunable surface acoustic wave (SAW) filter with electrostatic micro-electro-mechanical-system (MEMS) varactors. The tunable filter was constructed on a 15 Y LiNbO3 substrate to use Love wave with an electromechanical coupling coefficient as high as 25%. The bridge structure of the MEMS varactor was fabricated by Au electroplating on a sacrificial photoresist, which was finally removed by either O2 plasma ashing or O3 water etching. The measured center frequency was 1.07 GHz, and the bandwidth was 171 MHz, i.e., 16% in relative bandwidth. The MEMS varactor, which was connected to a series SAW resonator in parallel, pulled in by an actuation voltage of 150 V DC, and the right passband edge moved to lower frequency side by 15 MHz.
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U2 - 10.7567/JJAP.52.07HD13
DO - 10.7567/JJAP.52.07HD13
M3 - Article
AN - SCOPUS:84880985991
VL - 52
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART 2
M1 - 07HD13
ER -