Tube shape piezoelectric 2D microscanner for minimally invasive laser treatment

H. Akahori, H. Wada, Masayoshi Esashi, Yoichi Haga

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

Abstract

For precise laser treatment in the human body, a 2D (two dimensional) laser scanning micro tool has been developed. The tool is made up of an optical fiber, a micro rod lens and a 2D microscanner. The 2D microscanner has three piezoelectric unimorph cantilevers that have a ball joint at each tip and a mirror. The mirror is supported by a pivot from underside and is inclined by pushing down by three cantilevers on the top of the mirror. The maximum inclined angle of the mirror is about 26 degrees. For insertion the tool into a working channel of a conventional endoscope, these components are packaged into a 3.8-mm-external-diameter polymer tube.

Original languageEnglish
Article numberMP6
Pages (from-to)76-79
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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