Downsizing of products with complex shapes has been accelerated thanks to the rapid development of electrodevice manufacturing technology. Micro electromechanical systems (MEMS) are one of such typical examples. 3D strain measurement of such miniature products is needed to ensure their reliability. In the present study, as preliminary trial for it 3D tensile deformation behavior of a pure aluminum wire is examined using the synchrotron X-ray microtomography technique at Spring-8, Japan. Multipurpose in-situ tester is used to investigate real-time tensile deformation behavior of the Al wire. Tensile tests are carried out under strokes of 0, 0.005, 0.01 and 0.015mm. It measures 3D local deformation of a region of interest by tracking a relative movement of a pair of particles at each point. Local deformation behavior of the Al wire is identified to be different from macroscopic deformation behavior. It may be closely associated with underlying microstructure.