Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a novel triple mass resonator (TMR) consisting of two tuning fork type outer masses and an inner mass, which could increase capacity to tune the quality factor (Q-factor). Q-factor related to the anchor loss (QAnchor) could be controlled by electrostatic softening on springs connected to the inner mass, while the resonant frequency of anti-phase mode was almost constant. In contrast, when the DC bias was applied to the outer mass, the resonance frequency could be tuned same as conventional electrostatic softening. The experimental results showed the Q-factor decrease as large as 64.8% could be obtained by the DC bias of 15 V at the inner electrode, while the frequency change was as small as 278 ppm. On the other hand, when the bias was applied to the outer mass, frequency drop as high as 4429 ppm and Q-factor change as small as 9.8% could be obtained. By the proposed method, both Q-factor and resonance frequency could be controlled by the DC biases applied to the inner and outer masses, respectively.

Original languageEnglish
Title of host publicationINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728129839
DOIs
Publication statusPublished - 2020 Mar
Event7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 - Hiroshima, Japan
Duration: 2020 Mar 232020 Mar 26

Publication series

NameINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
CountryJapan
CityHiroshima
Period20/3/2320/3/26

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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