Trident-type tuning fork silicon gyroscope by the phase difference detection

Munemitsu Abe, Eiji Shinohara, Kazuo Hasegawa, Shinji Murata, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

8 Citations (Scopus)

Abstract

The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

Original languageEnglish
Pages508-513
Number of pages6
Publication statusPublished - 2000
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: 2000 Jan 232000 Jan 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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