Trident-type tuning fork silicon gyroscope by the phase difference detection

Munemitsu Abe; Eiji Shinohara; Kazuo Hasegawa; Shinji Murata; Masayoshi Esashi

Trident-type tuning fork silicon gyroscope by the phase difference detection

Munemitsu Abe, Eiji Shinohara, Kazuo Hasegawa, Shinji Murata, Masayoshi Esashi

Research output: Contribution to conference › Paper › peer-review

Abstract

The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

Original language	English
Pages	508-513
Number of pages	6
Publication status	Published - 2000
Externally published	Yes
Event	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: 2000 Jan 23 → 2000 Jan 27

Other

Other	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
City	Miyazaki, Jpn
Period	00/1/23 → 00/1/27

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

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title = "Trident-type tuning fork silicon gyroscope by the phase difference detection",

abstract = "The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.",

author = "Munemitsu Abe and Eiji Shinohara and Kazuo Hasegawa and Shinji Murata and Masayoshi Esashi",

year = "2000",

language = "English",

pages = "508--513",

note = "13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) ; Conference date: 23-01-2000 Through 27-01-2000",

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TY - CONF

T1 - Trident-type tuning fork silicon gyroscope by the phase difference detection

AU - Abe, Munemitsu

AU - Shinohara, Eiji

AU - Hasegawa, Kazuo

AU - Murata, Shinji

AU - Esashi, Masayoshi

PY - 2000

Y1 - 2000

N2 - The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

AB - The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

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UR - http://www.scopus.com/inward/citedby.url?scp=0033692572&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0033692572

SP - 508

EP - 513

T2 - 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)

Y2 - 23 January 2000 through 27 January 2000

ER -

Trident-type tuning fork silicon gyroscope by the phase difference detection

Abstract

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ASJC Scopus subject areas

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