Tribological properties of TiN/DLC nanocomposite coatings

Won Jae Yang, Tohru Sekino, Jong Won Yoon, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

Research output: Contribution to journalArticle

Abstract

The TiN/DLC nanocomposite coatings were grown on Si wafers using Ar/CH 4/TDMAT (Ti[(CH3)2N]4N2) gas mixtures by r.f. plasma enhanced chemical vapor deposition. The sliding friction tests were carried out using a ball-on-flat type tribometer. The different test parameters such as applied loads, counterpart materials and environment were applied to understand the tribological behavior in terms of friction and wear. The coatings provided a low friction coefficient and high wear resistance depending on the friction test conditions.

Original languageEnglish
Pages (from-to)385-388
Number of pages4
JournalKey Engineering Materials
Volume317-318
Publication statusPublished - 2006 Jan 1
Externally publishedYes

Keywords

  • Friction
  • Nanocomposite coatings
  • TiN/DLC
  • Wear

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Yang, W. J., Sekino, T., Yoon, J. W., Shim, K. B., Niihara, K., & Auh, K. H. (2006). Tribological properties of TiN/DLC nanocomposite coatings. Key Engineering Materials, 317-318, 385-388.