Trials for matching the fabrication of MEMS devices and assembly

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	100-103
Number of pages	4
Journal	Journal of Japan Institute of Electronics Packaging
Volume	11
Issue number	1
DOIs	https://doi.org/10.5104/jiep.11.100
Publication status	Published - 2008 Jan

ASJC Scopus subject areas

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title = "Trials for matching the fabrication of MEMS devices and assembly",

author = "Minoru Sasaki and Kazuhiro Hane",

year = "2008",

month = jan,

doi = "10.5104/jiep.11.100",

language = "English",

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pages = "100--103",

journal = "Journal of Japan Institute of Electronics Packaging",

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publisher = "The Japan Institute of Electronics Packaging",

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AU - Hane, Kazuhiro

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