Trend of MEMS (Micro ElectroMechanical Systems)

Masayoshi Esashi

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)733-738
Number of pages6
JournalShinku/Journal of the Vacuum Society of Japan
Volume45
Issue number10
DOIs
Publication statusPublished - 2002 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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